Subsidy Tracker Individual Entry

Company: 
ADVANCED TECHNOLOGY MATERIALS INC
Parent Company: 
Entegris
Subsidy Source: 
federal
State in Which Facility Is Located: 
Connecticut
Project Description: 

INTEGRATED MEMS REACTOR GAS MONITOR USING NOVEL THIN FILM CHEMISTRY FOR THECLOSED LOOP PROCESS CONTROL AND OPTIMIZATION OF PLASMA ETCH AND CLEAN

Year: 
2001
Major Industry of Parent: 
electrical and electronic equipment
Specific Industry of Parent: 
semiconductor components
Subsidy Value: 
$455,194
Program Name: 
Advanced Technology Program
Catalog of Federal Domestic Assistance code: 
11.612
Awarding Agency: 
Commerce Department: National Institute of Standards and Technology
Type of Subsidy: 
federal grant
Source of Data: 
Notes: 

Year is fiscal year. Subsidy value is federal funding amount in USA Spending. Program name is per Catalog of Federal Domestic Assistance code.

Source Notes: 
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