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Subsidy Tracker Parent Company Summary
Parent Company Name: Entegris
Ownership Structure: publicly traded (ticker symbol ENTG)
Headquartered in: Massachusetts
Major Industry: electrical and electronic equipment
Specific Industry: semiconductor components
| Subsidy Summary | Subsidy Value | Number of Awards |
| State/Local | $1,166,822 | 19 |
| Federal (grants and allocated tax credits) | $0 | 0 |
| TOTAL | $1,166,822 | 19 |
| Loan / Bailout Summary | Total Face Value | Number of Awards |
| State/Local loans, bond financing and venture capital | $0 | 0 |
| Federal loans, loan guarantees and bailout assistance (not including repayments) | $175,200 | 2 |
| TOTAL | $175,200 | 2 |
Time Period for State and Local Awards: Earliest year of data: 2004. Availability of data for earlier years varies greatly from program to program. The majority of the listings for this parent company are for the period since 2016.
Time Period for Federal Awards: FY2000 to the present
Notes: Dollar totals do not include awards for which no subsidy value is disclosed.
Links: For a summary of this company's regulatory violations see its Violation Tracker summary page
here.
| Top 5 States for state/local awards | Total Subsidy $ | Number of Awards |
| Colorado | $1,098,822 | 18 |
| Illinois | $68,000 | 1 |
Individual Subsidy Records:
Click on the company name for more information on each subsidy award.
| Company | Location | Subsidy Source | Year | Subsidy Value  . | Loan/Bailout Value | Type of Subsidy |
| ENTEGRIS INC | Colorado | state | 2013 | $260,568 | | tax credit/rebate |
| Entegris Inc | Colorado | state | 2016 | $141,409 | | tax credit/rebate |
| Entegris, Inc. | Colorado | state | 2011 | $109,266 | | grant |
| Entegris - Arrowswest | Colorado | state | 2019 | $73,534 | | tax credit/rebate |
| Entegris-Arrowswest | Colorado | state | 2020 | $70,325 | | tax credit/rebate |
| Cabot Microelectronics Corp. | Illinois | state | 2004 | $68,000 | | grant |
| Entegris, Inc | Colorado | state | | $66,925 | | tax credit/rebate |
| ENTEGRIS INC | Colorado | state | 2013 | $58,525 | | tax credit/rebate |
| Entegris Inc. | Colorado | state | 2014 | $55,738 | | tax credit/rebate |
| Entegris | Colorado | state | 2013 | $43,200 | | training reimbursement |
| Entegris Inc. | Colorado | state | 2016 | $41,730 | | tax credit/rebate |
| Entegris - Arrowswest | Colorado | state | 2018 | $38,844 | | tax credit/rebate |
| Entegris Inc | Colorado | state | 2017 | $38,427 | | tax credit/rebate |
| Entegris Inc | Colorado | state | 2014 | $34,564 | | tax credit/rebate |
| Entegris - Arrowswest | Colorado | state | 2021 | $30,255 | | tax credit/rebate |
| Entegris Inc. | Colorado | state | 2017 | $16,017 | | tax credit/rebate |
| Entegris | Colorado | state | 2014 | $13,824 | | training reimbursement |
| Entegris - Garden | Colorado | state | 2019 | $4,626 | | tax credit/rebate |
| Entegris - Garden | Colorado | state | 2018 | $1,045 | | tax credit/rebate |
| KMG, LLC | United States | federal | 2016 | | $99,300 | federal loan or loan guarantee |
| KMG, LLC | United States | federal | 2016 | | $75,900 | federal loan or loan guarantee |
