Subsidy Tracker Parent Company Summary

Parent Company Name: 
Entegris
Ownership Structure: 
publicly traded (ticker symbol ENTG)
Headquartered in: 
Massachusetts
Major Industry: 
electrical and electronic equipment
Specific Industry: 
semiconductor components
Subsidy SummarySubsidy ValueNumber of Awards
State/Local$998,24216
Federal (grants and allocated tax credits)$2,517,48913
TOTAL$3,515,73129
Loan / Bailout SummaryTotal Face ValueNumber of Awards
State/Local loans, bond financing and venture capital$00
Federal loans, loan guarantees and bailout assistance (not including repayments)$00
TOTAL$00
Time Period for State and Local Awards: 

Earliest year of data: 2011. Availability of data for earlier years varies greatly from program to program. The majority of the listings for this parent company are for the period since 2014.

Time Period for Federal Awards: 

FY2000 to the present

Notes: 

Dollar totals do not include awards for which no subsidy value is disclosed.

Associated Names: 

ADVANCED TECH MATERIALS; ATMI; ENTEGRIS; ENTEGRIS ARROWSWEST; ENTEGRIS GARDEN

Links: 

For a summary of this company's regulatory violations see its Violation Tracker summary page here.


Top 5 States for state/local awardsTotal Subsidy $Number of Awards
Colorado$998,24216

Individual Subsidy Records:

Click on the company name for more information on each subsidy award.
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Company Location Subsidy Source Year Subsidy Valuesort icon Loan/Bailout Value Type of Subsidy
ADVANCED TECHNOLOGY MATERIALS INC United States federal 2001 $455,194 federal grant
ATMI, INC. United States federal 2001 $450,000 federal grant
ATMI, INC. United States federal 2000 $432,000 federal grant
ADVANCED TECHNOLOGY MATERIALS INC United States federal 2000 $400,965 federal grant
ENTEGRIS INC Colorado state 2013 $260,568 tax credit/rebate
ADVANCED TECHNOLOGY MATERIALS United States federal 2002 $159,148 federal grant
Entegris Inc Colorado state 2016 $141,409 tax credit/rebate
ADVANCED TECHNOLOGY MATERIALS United States federal 2001 $140,000 federal grant
ADVANCED TECHNOLOGY MATERIALS United States federal 2003 $130,000 federal grant
ADVANCED TECHNOLOGY MATERIALS United States federal 2003 $120,000 federal grant
Entegris, Inc. Colorado state 2011 $109,266 grant
ADVANCED TECHNOLOGY MATERIALS United States federal 2000 $99,972 federal grant
Entegris - Arrowswest Colorado state 2019 $73,534 tax credit/rebate
Entegris, Inc Colorado state $66,925 tax credit/rebate
ENTEGRIS INC Colorado state 2013 $58,525 tax credit/rebate
Entegris Inc. Colorado state 2014 $55,738 tax credit/rebate
ADVANCED TECHNOLOGY MATERIALS United States federal 2003 $45,000 federal grant
Entegris Colorado state 2013 $43,200 training reimbursement
Entegris Inc. Colorado state 2016 $41,730 tax credit/rebate
Entegris - Arrowswest Colorado state 2018 $38,844 tax credit/rebate
Entegris Inc Colorado state 2017 $38,427 tax credit/rebate
Entegris Inc Colorado state 2014 $34,564 tax credit/rebate
ADVANCED TECHNOLOGY MATERIALS, INC. United States federal 2005 $30,210 federal grant
ADVANCED TECHNOLOGY MATERIALS United States federal 2002 $30,000 federal grant
ADVANCED TECHNOLOGY MATERIALS United States federal 2004 $25,000 federal grant
Entegris Inc. Colorado state 2017 $16,017 tax credit/rebate
Entegris Colorado state 2014 $13,824 training reimbursement
Entegris - Garden Colorado state 2019 $4,626 tax credit/rebate
Entegris - Garden Colorado state 2018 $1,045 tax credit/rebate
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